✦ LIBER ✦
Characterization of Mirror-polished Silicon Wafers by Makyoh Method: S. Tokura, N. Fujino, M. Ninomiya, K. Masuda, Journal of Crystal Growth, 103(1–4), pp. 437–442. (Jun 1990)
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 148 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0141-6359
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