✦ LIBER ✦
Characterization of Mirror-polished Si Wafers and Advanced Si Substrate Structures Using the Magic Mirror Method.: Hahn, S.; Kugimiya, K.; Vojtechovsky, K.; Sifalda, M.; Yamashita, M.; Blaustein, P. R.; Takahashi, K. Semiconductor Science and Technology. 1992 Jan; 7(1A): 80–85
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 142 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0141-6359
No coin nor oath required. For personal study only.