Characterization of materials for integrated pyroelectric sensors

✍ Scribed by Bernd Ploss; Siegfried Bauer

• Book ID: 103957464
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 375 KB
• Volume: 26
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(91)87023-v

✦ Synopsis

The pyroelectric element in an integrated IR sensor is usually in good thermal contact with the silicon chip. To characterize materials for these applications, heat sink figures of merit are introduced and various materials are compared. Integrated arrays with the materials poly( vinylidene fluoride) (PVDF) and LiTaO, are realized. The measured specific detectivity of arrays with 40 pm thick PVDF is D* = 1.4 x lO'cmfi/W.