Characterization of low-pressure microwave and radio frequency discharges in oxygen applying optical emission spectroscopy and multipole resonance probe

✍ Scribed by Steves, Simon; Styrnoll, Tim; Mitschker, Felix; Bienholz, Stefan; Nikita, Bibinov; Awakowicz, Peter

• Book ID: 121343815
• Publisher: Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 374 KB
• Volume: 46
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/46/44/445201