Characterization of ion implanted silicon—applications for IC process control: Matthew Markert and Michael I. Current Solid St. Technol. 101 (November 1983)

• Book ID: 108361407
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 92 KB
• Volume: 17
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(86)80036-2