Characterization of Inductively-Coupled-Plasma Damage on n-Type GaN Using Deep-Level Transient Spectroscopy and Synchrotron Radiation Photoemission Spectroscopy

✍ Scribed by Kyoung Jin Choi; Ho Won Jang; Jong-Lam Lee

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 141 KB
• Volume: 234
• Category: Article
• ISSN: 0370-1972
• DOI: 10.1002/1521-3951(200212)234:3<835::aid-pssb835>3.0.co;2-4