Characterization of hydrophobic, oxidized porous silicon layer formed by anodic etching of n+-type silicon surface in a HF:C2H5OH:HCl:H2O2:H2O electrolyte for bio-application

✍ Scribed by Naddaf, M.; Almariri, A.

• Book ID: 121570523
• Publisher: Springer
• Year: 2014
• Tongue: English
• Weight: 838 KB
• Volume: 116
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-014-8230-9