✦ LIBER ✦
Characterization of high-k gate dielectric and metal gate electrode semiconductor samples with a total reflection X-ray fluorescence spectrometer
✍ Scribed by Chris M. Sparks; Meredith R. Beebe; Joe Bennett; Brendan Foran; Carolyn Gondran; Alex Hou
- Book ID
- 108261509
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 443 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0584-8547
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