Characterization of gas transport through micromachined submicron channels in silicon : P. Norberg et al. Vacuum, 45(1), 139 (1994)

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 111 KB
• Volume: 34
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(94)90424-3