Characterization of electron beam evaporated ZnO thin films and stacking ZnO fabricated by e-beam evaporation and rf magnetron sputtering for the realization of resonators

✍ Scribed by R. Al Asmar; D. Zaouk; Ph. Bahouth; J. Podleki; A. Foucaran

• Book ID: 108207524
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 431 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.10.010