Characterization of diffraction gratings in a rigorous domain with optical scatterometry: hierarchical neural-network model

✍ Scribed by Kallioniemi, Ilkka ;Saarinen, Jyrki ;Oja, Erkki

• Book ID: 115348356
• Publisher: The Optical Society
• Year: 1999
• Tongue: English
• Weight: 166 KB
• Volume: 38
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.38.005920