Characterization of diamond-like carbon thin films produced by pulsed-DC low pressure plasma monitored by a Langmuir probe in time-resolved mode

✍ Scribed by Corbella, C.; Pascual, E.; Gómez, M.A.; Polo, M.C.; García-Céspedes, J.; Andújar, J.L.; Bertran, E.

• Book ID: 118005660
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 161 KB
• Volume: 14
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2004.12.059