✦ LIBER ✦
Characterization of defects due to low voltage thin film sputter deposition by means of the MIS junction
✍ Scribed by H Keppner; P Munz; C Maier; E Bucher
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 228 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.