Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy

✍ Scribed by Kang, Shuhui; Vogt, Bryan D.; Wu, Wen-li; Prabhu, Vivek M.; VanderHart, David L.; Rao, Ashwin; Lin, Eric K.; Turnquest, Karen

• Book ID: 127141439
• Publisher: American Chemical Society
• Year: 2007
• Tongue: English
• Weight: 126 KB
• Volume: 40
• Category: Article
• ISSN: 0024-9297
• DOI: 10.1021/ma062579c