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Characterization of carbon in heteroepitaxial Si1 − x − yGexCy thin films via combined ion channeling and nuclear resonance analysis

✍ Scribed by S. Hearne; N. Herbots; J. Xiang; P. Ye; H. Jacobsson


Book ID
113287492
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
672 KB
Volume
118
Category
Article
ISSN
0168-583X

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