✦ LIBER ✦

Characterization of Bragg reflector structures using scanning reflectance spectral mapping

✍ Scribed by N.J. Bulitka; C.J.L. Moore; J. Hennessy; G.S. Tompa; P. Zawadzki; E. Wolak

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 336 KB
Volume: 28
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(94)90105-8

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✦ Synopsis

A technique for assessing full wafer AIAs/GaAs Bragg reflector structures by measuring the normalized reflectance at an array of points over a wafer is presented in this paper. High resolution maps allow statistically meaningful calculations to be performed and also show reflectance patterns relating back to the deposition process. Specific examples illustrating the utility of this technique in facilitating the optimization of the epitaxial layer deposition process are given.