✦ LIBER ✦
Characterization of an Ar/O 2 magnetron plasma by a multi-species Monte Carlo model
✍ Scribed by Bultinck, E; Bogaerts, A
- Book ID
- 121434517
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 967 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0963-0252
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