✦ LIBER ✦
Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing
✍ Scribed by Su, Y; Evans, A G R; Brunnschweiler, A; Ensell, G
- Book ID
- 121287636
- Publisher
- Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 305 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0960-1317
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