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Characterization of 8-μm period half megabit ion-implanted memory chip designs

✍ Scribed by Bonyhard, P.; Ekholm, D.; Hagedorn, F.; Muehlner, D.; Nelson, T.; Roman, B.

Book ID: 114646984
Publisher: IEEE
Year: 1984
Tongue: English
Weight: 571 KB
Volume: 20
Category: Article
ISSN: 0018-9464
DOI: 10.1109/tmag.1984.1063014

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