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Characterization and morphology of chemical vapour deposition of silicon : C.H.J. Brekel. Acta electronica21, (2) 209 (1978)

Book ID: 103277331
Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 130 KB
Volume: 19
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(79)90112-4

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