Enhancement of VUV Emission from a Coaxi
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S. Y. Jou; C. T. Hung; Y. M. Chiu; J. S. Wu; B. Y. Wei
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Article
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2011
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John Wiley and Sons
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English
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## Abstract Enhancement of vacuum UV emission (172 nm VUV) from a coaxial xenon excimer UV lamp (EUV) driven by distorted 50 kHz bipolar square voltages, as compared to that by sinusoidal voltages, is investigated numerically in this paper. A selfβconsistent radial oneβdimensional fluid model, taki