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Characterization and modeling of a microwave driven xenon excimer lamp

✍ Scribed by Ametepe, Joseph D.; Diggs, Jessie; Manos, Dennis M.; Kelley, Michael J.


Book ID
121506445
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
344 KB
Volume
85
Category
Article
ISSN
0021-8979

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## Abstract Enhancement of vacuum UV emission (172 nm VUV) from a coaxial xenon excimer UV lamp (EUV) driven by distorted 50 kHz bipolar square voltages, as compared to that by sinusoidal voltages, is investigated numerically in this paper. A self‐consistent radial one‐dimensional fluid model, taki