✦ LIBER ✦
Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators
✍ Scribed by Jorge Hernando; Jose Luis Sánchez-Rojas; Ulrich Schmid; Abdallah Ababneh; Günter Marchand; Helmut Seidel
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 350 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
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