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Characterization and dielectric properties of GeOx thin films prepared by radio frequency (RF) reactive sputtering

✍ Scribed by B.G. Segda; C. Caperaa; M. Jacquet; J.P. Besse

Book ID: 108224357
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 814 KB
Volume: 266
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2008.07.023

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