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Characteristics of Zn diffusion in planar and patterned InP substrate using Zn3P2 film and rapid thermal annealing process

✍ Scribed by Seung-Yeul Yang; Ji-Beom Yoo


Book ID
108422758
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
146 KB
Volume
131
Category
Article
ISSN
0257-8972

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