✦ LIBER ✦
Characteristics of silicon nitride after O/sub 2/ plasma surface treatment for pH-ISFET applications
✍ Scribed by Li-Te Yin; Jung-Chuan Chou; Wen-Yaw Chung; Tai-Ping Sun; Shen-Ken Hsiung
- Book ID
- 114531045
- Publisher
- IEEE
- Year
- 2001
- Tongue
- English
- Weight
- 124 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0018-9294
No coin nor oath required. For personal study only.