Characteristics of scanning magnetic field-type coaxial ECR plasma for inner coating of slender tubes

✍ Scribed by Eiichiro Morisaki; Tetsuhira Nagano; Hiroshi Fujiyama

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 199 KB
• Volume: 130
• Category: Article
• ISSN: 0424-7760
• DOI: 10.1002/(sici)1520-6416(20000130)130:2<18::aid-eej3>3.0.co;2-q