✦ LIBER ✦
Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate
✍ Scribed by W. C. Chang; S. J. Chang; C. Y. Sue; C. L. Hsu
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 141 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0895-2477
No coin nor oath required. For personal study only.
✦ Synopsis
In this letter, the wet etching technique is utilized to ( ) determine the proton exchange PE depth of z-cut nickel-indiffused lithium niobate under different nickel indiffusion parameters. It is demonstrated that the existence of nickel atoms reduces the PE depth.
While this result was applied to the fabrication of a ridge-type wa¨eguide, the tilt angle of the sidewall on the ridge wa¨eguide was about 70Њ, which has been successfully increased.