✦ LIBER ✦
Characteristics of multi-layered metallizations consisting of tantalum and aluminium on silicon and/or SiO2: T. Kobayashi and K. Murase. Proc. IEEE 24th Electronic Components Conference, Washington D.C. 79 (13–15 May 1974)
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 113 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0026-2714
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