Analysis of fluid flow through micro-flu
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Bayram Celik; Firat Oguz Edis
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Article
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2006
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John Wiley and Sons
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English
β 563 KB
## Abstract Gas flow in microβelectroβmechanical systems can be considered as rarefied since the ratio of free molecular path length to the characteristic length of the device is high. It is possible to analyse these flows using a conventional NavierβStokes solver with modified boundary conditions