✦ LIBER ✦
Characteristics of low-energy BF2- or As-implanted layers and their effect on the electrical performance of 0.15-μm MOSFET's
✍ Scribed by Nishida, A.; Murakami, E.; Kimura, S.
- Book ID
- 114537212
- Publisher
- IEEE
- Year
- 1998
- Tongue
- English
- Weight
- 511 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0018-9383
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