Characteristics of ZnO:Al thin films co-
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Y.H. Kim; J. Jeong; K.S. Lee; J.K. Park; Y.J. Baik; T.-Y. Seong; W.M. Kim
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Article
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2010
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Elsevier Science
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English
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Fluorine and hydrogen co-doped ZnO:Al (AZO) films were prepared by radio frequency (rf) magnetron sputtering of ZnO targets containing 1 wt.% Al 2 O 3 on Corning glass at substrate temperature of 150 β’ C with Ar/CF 4 /H 2 gas mixtures, and the structural, electrical and optical properties of the as-