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Characteristics of hollow-cathode lamps in the variable pulsed supply regime

✍ Scribed by E. D. Prudnikov; Yu. S. Shapkina

Publisher: Springer US
Year: 1993
Tongue: English
Weight: 329 KB
Volume: 58
Category: Article
ISSN: 0021-9037
DOI: 10.1007/bf00662889

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## Abstract The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen wit