✦ LIBER ✦
Characteristics of DC magnetron sputtered ternary cobalt–nickel silicide thin films for ultra shallow junction devices
✍ Scribed by D. Panda; A. Dhar; S.K. Ray
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 585 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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