✦ LIBER ✦
Characteristics of capacitively coupled helium plasma driven by various frequencies under constant power conditions
✍ Scribed by Abdel-Fattah, E.
- Book ID
- 122037177
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 992 KB
- Volume
- 97
- Category
- Article
- ISSN
- 0042-207X
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