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Characteristics and reliabilities on the Dicing before Grinding (DBG) process in nMOSFETs

✍ Scribed by Kao, Hsuan-Ling; Yeh, Chih-Sheng; Chen, Meng-Ting; Chiu, Hsien-Chin; Chang, Li-Chun


Book ID
119373505
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
788 KB
Volume
79
Category
Article
ISSN
0038-1101

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