Characteristics and Modeling of Sub-10-nm Planar Bulk CMOS Devices Fabricated by Lateral Source/Drain Junction Control

✍ Scribed by Wakabayashi, H.; Ezaki, T.; Sakamoto, T.; Kawaura, H.; Ikarashi, N.; Ikezawa, N.; Narihiro, M.; Ochiai, Y.; Ikezawa, T.; Takeuchi, K.; Yamamoto, T.; Hane, M.; Mogami, T.

• Book ID: 114618381
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 597 KB
• Volume: 53
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2006.880169