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Characteristics and growth mechanisms of TixSi(1-x)Oy films by liquid phase deposition

✍ Scribed by M.K. Lee; C.M. Shih; W.H. Shieh

Book ID: 106024060
Publisher: Springer
Year: 2002
Tongue: English
Weight: 97 KB
Volume: 74
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390100882

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