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Characteristic structural features of amorphous hydrated silicon films deposited by direct-currect decomposition of silane in a magnetic field

✍ Scribed by O. A. Golikova; A. N. Kuznetsov; V. Kh. Kudoyarova; M. M. Kazanin


Book ID
110119535
Publisher
Springer
Year
1997
Tongue
English
Weight
73 KB
Volume
31
Category
Article
ISSN
1063-7826

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