✦ LIBER ✦
Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling
✍ Scribed by J. M. Cairney; S. G. Harris; L. W. Ma; P. R. Munroe; E. D. Doyle
- Book ID
- 111590393
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 557 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0022-2461
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