Characterisation of the Al2O3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H–SiC devices

✍ Scribed by Maciej Wolborski; Mietek Bakowski; Armando Ortiz; Viljami Pore; Adolf Schöner; Mikko Ritala; Markku Leskelä; Anders Hallén

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 570 KB
• Volume: 46
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2005.08.002