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Characterisation of aluminium nitride layers formed directly by 700–800 keV 15N2+ implantation into aluminium: Yoshiaki Kido et al, J Phys D: Appl Phys, 15 (10), 1982, 2067–2077


Book ID
103468065
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
147 KB
Volume
35
Category
Article
ISSN
0042-207X

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