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Characterisation of a saddle field source for deposition of diamond-like carbon films

✍ Scribed by A.A. Voevodin; J.M. Schneider; C. Caperaa; P. Stevenson; A. Matthews

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 552 KB
Volume: 22
Category: Article
ISSN: 0272-8842
DOI: 10.1016/0272-8842(95)00020-8

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