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Channel waveguides formed by ion implantation of PECVD grown silica

โœ Scribed by Leech, P.W.; Faith, M.F.; Johnson, C.M.; Ridgway, M.C.; Bazylenko, M.


Book ID
114455630
Publisher
The Institution of Electrical Engineers
Year
1997
Tongue
English
Weight
487 KB
Volume
144
Category
Article
ISSN
1350-2433

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