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Channel temperature measurement of PHEMT by means of optical probes

✍ Scribed by Savian, D.; Di Carlo, A.; Lugli, P.; Peroni, M.; Cetronio, C.; Lanzieri, C.; Meneghesso, G.; Zanoni, E.

Book ID: 118274759
Publisher: The Institution of Electrical Engineers
Year: 2003
Tongue: English
Weight: 257 KB
Volume: 39
Category: Article
ISSN: 0013-5194
DOI: 10.1049/el:20030135

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## Abstract In this paper a short overview of the diagnostics of low temperature plasmas by optical means is presented. It is described how the results of the optical measurements, namely the intensities and profiles of the spectral lines can be used for measuring the low temperature plasma paramet