✦ LIBER ✦
Channel Strain Measurement in 32-nm-Node Complementary Metal–Oxide–Semiconductor Field-Effect Transistor by Raman Spectroscopy
✍ Scribed by Takei, Munehisa; Hashiguchi, Hiroki; Yamaguchi, Takuya; Kosemura, Daisuke; Nagata, Kohki; Ogura, Atsushi
- Book ID
- 120286834
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2012
- Tongue
- English
- Weight
- 793 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0021-4922
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