✦ LIBER ✦
Changes of hydrogen evolution thermodynamics induced by He and H2 dilution in PECVD a-Si:H films: influence on thermal crystallization
✍ Scribed by P delli Veneri; C Privato; E Terzini
- Book ID
- 117150288
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 136 KB
- Volume
- 266-269
- Category
- Article
- ISSN
- 0022-3093
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