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Challenges in using photosensitive embedding material to planarize multi-layer coils for actuator systems

✍ Scribed by T. Kohlmeier; H.H. Gatzen


Book ID
114225539
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
146 KB
Volume
242-245
Category
Article
ISSN
0304-8853

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