Challenges for Electron Tomography of Nanoscale Electrical Devices: Geometry and Beam Damage

✍ Scribed by Mecklenburg, M; Shevitski, B; Singer, S; Regan, B

• Book ID: 111957179
• Publisher: Cambridge University Press
• Year: 2011
• Tongue: English
• Weight: 606 KB
• Volume: 17
• Category: Article
• ISSN: 1431-9276
• DOI: 10.1017/s1431927611008610