Challenges for atomic scale modeling in alternative gate stack engineering

✍ Scribed by Kawamoto, A.; Jameson, J.; Kyeongjae Cho; Dutton, R.W.

• Book ID: 114538283
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 249 KB
• Volume: 47
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.870549