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Chain Conformation Effects on Molecular Motions at the Surface of Poly(methyl methacrylate) Films

โœ Scribed by Fujii, Yoshihisa; Akabori, Kei-ichi; Tanaka, Keiji; Nagamura, Toshihiko

Book ID
111776925
Publisher
Nature Publishing Group
Year
2007
Tongue
English
Weight
142 KB
Volume
39
Category
Article
ISSN
0032-3896

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Molecular weight and processing effects
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โœ A. Kokkinis; E.S. Valamontes; D. Goustouridis; Th. Ganetsos; K. Beltsios; I. Rap ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 264 KB

An experimental set-up based on multiwavelength interferometry, is applied in order to study in-situ the dissolution process of thin resist films. The interference function was the basis for a fitting algorithm, which analyses the experimental data and evaluates the progress of the resist thickness